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Transpector CPM 3 緊湊型過(guò)程監(jiān)控器

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快速、現(xiàn)場(chǎng)就緒過(guò)程監(jiān)測(cè)系統(tǒng)

詳細(xì)信息 在線詢價(jià)

功能

  • ALD、蝕刻、CVD 和 300 mm 除氣殘余氣體分析儀 — 實(shí)現(xiàn)實(shí)時(shí)過(guò)程監(jiān)測(cè)和分析
  • ALD 就緒，測(cè)量速度為每點(diǎn) 1.8 ms（每秒 555 點(diǎn)）
  • 在大多數(shù)苛刻 CVD 和蝕刻應(yīng)用中，展現(xiàn)出經(jīng)實(shí)踐驗(yàn)證的耐久性和可靠性
  • 應(yīng)用集成 — Transpector CPM 集成 FabGuard 軟件，由 INFICON 應(yīng)用專家提供支持，是一款強(qiáng)大的過(guò)程監(jiān)測(cè)與診斷工具
  • 緊湊尺寸 — 允許輕松集成到半導(dǎo)體生產(chǎn)設(shè)備
  • Hexblock™ 含三個(gè)壓力進(jìn)口并減少表面積，以小化表面反應(yīng)時(shí)間和響應(yīng)時(shí)間
  • 電容隔膜計(jì) (CDG) — CDG 允許用戶監(jiān)測(cè)過(guò)程壓力，并自動(dòng)保護(hù)系統(tǒng)不出現(xiàn)壓力偏移
  • 自動(dòng)校準(zhǔn) — 確保*數(shù)據(jù)穩(wěn)定性和精度，以便進(jìn)行各傳感器和工具的腔室匹配

規(guī)格

類型 100 AMU CPM 200 AMU CPM 300 AMU CPM
分辨率 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height
總壓力范圍1 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr
總壓力精度2 +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr
大離子源工作壓力3 1E-3 Torr 1E-3 Torr 1E-3 Torr
標(biāo)稱工作壓力? 2E-4 Torr 2E-4 Torr 2E-4 Torr
系統(tǒng)工作壓力 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm
靈敏度（低發(fā)射） > 4E-6 Amps/Torr > 2E-6 Amps/Torr > 1E-6 Amps/Torr
靈敏度（高發(fā)射） > 2E-5 Amps/Torr > 1E-5 Amps/Torr > 5E-6 Amps/Torr
小可檢測(cè)分壓? 1E-13 Torr 2E-13 Torr 4E-13 Torr
大數(shù)據(jù)速率 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec)
豐度靈敏度? < 5=""> < 10=""> < 100="">
零沖擊? < 2=""> < 25=""> < 200="">
檢測(cè)限值? < 1=""> < 2=""> < 4="">
線性度? +/- 20% +/- 20% +/- 20%
小背景壓力 1E-8 Torr 1E-8 Torr 1E-8 Torr
大傳感器和進(jìn)氣溫度 °C 150 150 150

1 使用總壓強(qiáng)鏡頭獲得的離子源壓強(qiáng)讀數(shù) @ 低發(fā)射

2 總壓強(qiáng)準(zhǔn)確度 @ 低發(fā)射

3 離子源大工作壓強(qiáng) @ 低發(fā)射

4 2x10-4 Torr 的離子源將在四極區(qū)域產(chǎn)生大約 1x10-5 Torr 的壓強(qiáng)

5 EM 開(kāi)啟且保壓時(shí)間為 1 秒時(shí)離子源處的 MDPP

6 質(zhì)量數(shù) 40 對(duì) 41 AMU 的貢獻(xiàn)

7 零沖擊對(duì) 2 AMU 的貢獻(xiàn)

8 空氣中的氪的小可檢出濃度 @ 1 秒保壓時(shí)間

9 適用于 1 Torr 孔板或更低設(shè)置。0.1 至 2 倍標(biāo)稱孔板壓強(qiáng)條件下的線性 @ 低發(fā)射

耗材

100 AMU CPM
零件號(hào) 明細(xì)
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
200 AMU CPM
零件號(hào) 明細(xì)
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
300 AMU CPM
零件號(hào) 明細(xì)
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner

備件

100 AMU CPM
零件號(hào) 明細(xì)
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM
零件號(hào) 明細(xì)
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM
零件號(hào) 明細(xì)
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable

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