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SKY CDG100D 0.1 ... 1000 Torr / mbar

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詳細信息 在線詢價

好處

  • 擁有成本更低,預(yù)熱速度快 50%,節(jié)能,低功耗
  • 易于集成,各種滿刻度、法蘭和接口,標(biāo)配兩個設(shè)定點
  • 輕松一鍵歸零或遠程信號歸零指令,可調(diào)零點偏移
  • 診斷端口便于快速服務(wù)與維護
  • 兩年保修服務(wù),*的加熱概念和真空計保護延長了使用壽命
  • 的信號穩(wěn)定性和可重復(fù)性,即使是嚴苛的等離子應(yīng)用,都無需*執(zhí)行重新校準(zhǔn)
  • 合規(guī)和標(biāo)準(zhǔn):CE、EN、UL、SEMI、RoHS

典型應(yīng)用

  • 蝕刻、CVD、PVD 及其他半導(dǎo)體生產(chǎn)過程
  • 化學(xué)和腐蝕性高溫過程
  • 需要真空計保護的一般薄膜和真空過程

新聞

現(xiàn)在提供 EtherCAT 數(shù)字接口!

規(guī)格

類型 1000 ... 500 Torr / mbar 200 ... 1 Torr / mbar 0.5 ... 0.1 Torr / mbar
精度 (1) % of reading 0.2 0.2 0.4
溫度效應(yīng)      
零點 percent FS/°C 0.0025 0.0025 0.005
滿量程 % of reading / °C 0.02 0.02 0.02
壓力,大 kPa (absolute) 400 260 130
分辨率 percent FS 0.003 0.003 0.003
低讀數(shù) percent FS 0.01 0.01 0.01
建議的低讀數(shù) percent FS 0.05 0.05 0.05
建議的低控制壓力 percent FS 0.5 0.5 0.5
溫度      
運行(周圍環(huán)境)(5) °C +10 … +50 +10 … +50 +10 … +50
在法蘭處烘烤 °C ≤110 ≤110 ≤110
貯存 °C –20 … +65 –20 … +65 –20 … +65
電源電壓 +14 … +30 VDC or±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
功耗      
加熱時 W ≤15 ≤15 ≤15
運行溫度 W ≤10 ≤10 ≤10
輸出信號(模擬) V (dc) 0 … +10 0 … +10 0 … +10
反應(yīng)時間 (2) ms 30 30 130 / 30 (3)
保護等級 IP 40 IP 40 IP 40
標(biāo)準(zhǔn)      
CE 合規(guī) EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS
ETL 認證 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1
SEMI 合規(guī) (5) SEMI S2 SEMI S2 SEMI S2
電氣連接 D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
設(shè)定點      
設(shè)定點數(shù)量 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
繼電器觸點 ≤30 ≤30 ≤30
滯后 percent FS 1 1 1
診斷端口      
協(xié)議 RS232-C RS232-C RS232-C
讀數(shù) pressure, status, ID pressure, status, ID pressure, status, ID
設(shè)置 set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
暴露于真空的材料 Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
內(nèi)部容積      
內(nèi)部容積 1/2'' 管 cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
重量      
重量 1/2'' 管 g 837 837 837
重量 DN 16 ISO KF g 852 852 852
重量 DN 16 CF-R g 875 875 875
重量 8 VCR® g 897 897 897
EtherCAT      
協(xié)議 EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
通訊標(biāo)準(zhǔn) ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
節(jié)點地址 Explicit Device Identification Explicit Device Identification Explicit Device Identification
物理層 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
數(shù)字功能讀取 pressure, status, ID pressure, status, ID pressure, status, ID
數(shù)字功能設(shè)置 set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
(CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information
過程數(shù)據(jù) Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
EtherCAT 連接器 2 x RJ45, 8-pin (socket), IN and OUT 2 x RJ45, 8-pin (socket), IN and OUT 2 x RJ45, 8-pin (socket), IN and OUT
電纜 shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
電纜長度 m (ft.) ≤100 (330) ≤100 (330) ≤100 (330)
Signal processing time ms 2 2 2
Profinet      
Communication protocol protocol specalized for Profinet protocol specalized for Profinet protocol specalized for Profinet
Data rate 100 Mbps 100 Mbps 100 Mbps
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Profinet connector 2 x RJ45, 8-pin (socket), input & output 2 x RJ45, 8-pin (socket), input & output 2 x RJ45, 8-pin (socket), input & output
Profinet Cable Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher)
Cable lenght

<100 m (330 ft)

<100 m (330 ft)

<100 m (330 ft)

DeviceNet™      
協(xié)議 DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only
數(shù)據(jù)率 kBaud
電纜長度 125 kbps m (ft.) 500 (1650) 500 (1650) 500 (1650)
電纜長度 250 kbps m (ft.) 250 (825) 250 (825) 250 (825)
電纜長度 500 kbps m (ft.) 100 (330) 100 (330) 100 (330)
MAC ID address 00 - 63 by switch or network programmable address 00 - 63 by switch or network programmable address 00 - 63 by switch or network programmable
數(shù)字功能讀取 pressure, status, ID pressure, status, ID pressure, status, ID
數(shù)字功能設(shè)置 set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
技術(shù)規(guī)格 DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)
設(shè)備類型 ''VG'' vacuum gauge ''VG'' vacuum gauge ''VG'' vacuum gauge
I / O 從屬傳訊 polling only polling only polling only
真空計 D 型連接器的電源電壓 +14 … +30 VDC or ±15 V / ≤12 W +14 … +30 VDC or ±15 V / ≤12 W +14 … +30 VDC or ±15 V / ≤12 W
為微型連接器上的 DeviceNet 收發(fā)器提供電壓 24 V nom / <2 w="" (11="" …="" 25=""> 24 V nom / <2 w="" (11="" …="" 25=""> 24 V nom / <2 w="" (11="" …="" 25="">
DeviceNet™ 連接器 microstyle, 5 pin, male microstyle, 5 pin, male microstyle, 5 pin, male
CDG(模擬輸出、CDG 電源電壓、設(shè)定點)連接器 D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male
Profibus DP      
波特率 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500
地址 address 00 - 125 by switch or network programmable address 00 - 125 by switch or network programmable address 00 - 125 by switch or network programmable
數(shù)字功能讀取 pressure, status, ID pressure, status, ID pressure, status, ID
數(shù)字功能設(shè)置 set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Profibus DP 連接器 D-sub, 9 pin, female D-sub, 9 pin, female D-sub, 9 pin, female
CDG(模擬輸出、電源電壓、設(shè)定點)連接器 D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male

(1) 非線性,遲滯,在 25 °C 環(huán)境工作溫度中的可重復(fù)性,2 小時工作后無溫度影響。

(2) 提高 10 … 90 % FS 

(3) 僅用于壓力控制類型

(4) 18% 鉻,10% 鎳,3% 鉬,69% 鐵

(5) 環(huán)境溫度 > 40°C 可能會使表面溫度升高到 SEMI S2 合規(guī)水平以上。

CDG100D Sky PIM Ordering Information

數(shù)據(jù)表

手冊

手冊

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